April 6, 2001
This talk will include a brief review of MEMS fabrication technologies that are being developed for micro fabrication applications. The basic categories of bulk, LIGA and surface micromachining technologies will be discussed and examples of applications that have been fabricated by these technologies will be described. As in most manufacturing arenas, any particular fabrication process is not necessarily the best for all applications. Therefore, we will discuss the advantages and disadvantages that each type of technology brings to bear on the problem. This talk will also discuss the Summit V. surface micromachining process that has been developed at Sandia. In addition to examples of devices that have been fabricated in this technology, there will be a discussion about the design infrastructure that has been developed to enable access to this technology by a broad range of University, Government and Commercial users.
Dr. James J. Allen received his B.S. and M.S. in Mechanical Engineering from the University of Arkansas in 1971 and 1977 respectively and a Ph.D. in the same subject from Purdue University in 1981. He is a registered professional engineer in the state of New Mexico. Dr. Allen spent 6 years in the US Navy nuclear propulsion program and served aboard the fast attack submarines, USS Nautilus, USS Haddock and USS Barb and has taught in the Mechanical Engineering Department at Oklahoma State University from 1981-1984. He has been at Sandia National Laboratory for 16 years, where he has worked on a number of weapon programs, such as the Trident I and Trident II. Dr. Allen has been involved in MEMS Technology department at Sandia for 5 years, where he is active in design and research for MicroElectroMechanical Systems (MEMS) applications. He holds 2 patents and has 3 patents pending for MEMS devices and is currently team leader of the Advanced Concepts for MEMS/Novel Si Technology department.